Method and apparatus for inspecting pattern defects

ABSTRACT

An apparatus for inspecting pattern defects, the apparatus including: a defect candidate extraction unit configured to perform a defect candidate extraction process by comparing a detected image signal with a reference image signal; and a defect detection unit configured to perform a defect detection process and a defect classification process based on a partial image containing a defect candidate that is extracted by the defect candidate extraction unit, wherein the processes performed by the defect candidate extraction unit and/or the defect detection unit are performed asynchronously with an image acquisition process.

CROSS REFERENCE TO RELATED APPLICATION

This is a continuation of U.S. application Ser. No. 10/992,759, filedNov. 22, 2004 now U.S. Pat. No. 7,388,979. This application relates toand claims priority from Japanese Patent Application No. 2003-390655,filed on Nov. 20, 2003. The entirety of the contents and subject matterof all of the above is incorporated herein by reference.

BACKGROUND OF THE INVENTION

The present invention relates to an inspection technology for comparingbetween a detected image and a reference image of an inspection target,which is obtained through the use, for instance, of light or laser beam,and detecting microscopic pattern defects, foreign matter, and the likebased on the differences, and more particularly to a pattern defectinspection method and apparatus that are suitable for conducting avisual inspection of semiconductor wafers, TFTs, photomasks, and thelike.

A known conventional technology for pattern defect inspection isdisclosed, for instance, by Japanese Patent Laid-open No. 2001-5961.

A microscopic defect inspection apparatus is disclosed by JapanesePatent Laid-open No. 2001-5961. This microscopic defect inspectionapparatus includes an image signal detection section, ananalog-to-digital conversion section, a delay circuit section, a firstimage processing circuit section, a second image processing circuitsection, and a defect judgment section. The image signal detectionsection, which includes radiation optical system for radiating DUV lighthaving a wavelength of not more than 400 nm, and detection opticalsystem equipped with a TDI image sensor or other similar image sensor,detects image signals having a pixel size of not larger than 0.2 μm froman inspection target and outputs the detected image signals in aparallel manner over a plurality of channels. The analog-to-digitalconversion section forms each of the multi-channel image signals thatare input in a parallel manner from the image signal detection section.The delay circuit section outputs multi-channel reference image data ina parallel manner. The first image processing circuit section performs amulti-channel, parallel image process to detect a positionaldisplacement between the two types of image data and correct anypositional displacement in accordance with the multi-channel detectedimage data derived from the analog-to-digital conversion section and themulti-channel reference image data derived from the delay circuitsection. The second image processing circuit section performs amulti-channel, parallel image comparison process to compare referenceimage data and detected image data, which is received from the firstimage processing circuit section and subjected to positionaldisplacement correction on an individual channel basis, and extractinformation about defect candidate points. The defect judgment sectionmakes a detailed analysis in accordance with the information aboutmulti-channel defect candidate points, which is input from the secondimage processing circuit section, and judges whether the defectcandidate points are true defects.

Circuit patterns formed on semiconductor wafers targeted for inspectionhave been overly enhanced to a microscopic size of 0.1 μm or smallerwhile the diameters of semiconductor wafers have been increased. Sincethe circuit patterns are overly enhanced to a microscopic size, it isdemanded that defects, which are smaller than circuit patterns in size,be detected. To fill such a demand, UV light or DUV light is used as theillumination light, and high-magnification detection optical system isused to achieve high resolution and provide a pixel size smaller thanthe defects to be detected. Consequently, the image information obtainedfrom an inspection target will become huge. Under these circumstances,it is demanded that the obtained image information be rapidly processedto inspect for microscopic defects with high sensitivity and highreliability. However, these requirements are not adequately consideredby the aforementioned conventional technology.

Due to the use of a CMP or other polishing method, semiconductor waferstargeted for inspection slightly vary in pattern film thickness.Therefore, local brightness differences are found in the image signalsbetween various chips, which should basically be the same. In FIG. 4A,the reference numeral 41 denotes a typical inspection target imagesignal. In FIG. 4B, the reference numeral 42 denotes a typical referenceimage signal. As indicated by 4 a in FIGS. 4A and 4 b in FIG. 4B, thesame patterns of the inspection target image signal and reference imagesignal differ in brightness. Further, there is an ultramicroscopicdefect 4 d in 41 in FIG. 4A, which is an inspection target image. Insuch an instance, the resulting difference image looks like FIG. 4C. Thedifference image is obtained by generating density differences inaccordance with the difference values derived from various locations ofthe inspection target image and reference image. FIG. 4D shows awaveform that represents difference values derived from locations1D-1D′. If any difference value exceeding a threshold value TH islabeled as a defect as is the case with the use of a conventionalmethod, the difference value 4 c, which represents the differencebetween patterns 4 a and 4 b, which differ in brightness, is detected asa defect. This is a problem that a false-information that should not bedetected originally as a defect will occur so much. Such afalse-information could be avoided, for instance, by increasing thethreshold value TH (increasing from TH to TH2 as shown in FIG. 4D).However, the use of such a false-information avoidance method decreasesthe sensitivity so that the ultramicroscopic defect 4 d, whichcorresponds to a difference value smaller than the increased thresholdvalue, cannot be detected.

SUMMARY OF THE INVENTION

The present invention provides a pattern defect inspection method andapparatus that can reveal ultramicroscopic defects on an inspectiontarget in which ultramicroscopic circuit patterns are formed, and caninspect the defects with high sensitivity and at a high speed.

In other words, the present invention provides a pattern defectinspection apparatus and method for inspecting an inspection target (asample) for pattern defects. The pattern defect inspection apparatusincludes image acquisition means for acquiring a detected image signaland a reference image signal from the inspection target and storing theacquired image signals in an image memory; a defect candidate extractionunit for extracting a defect candidate by comparing a detected imagesignal with the reference image signal, which are read from the imagememory; and a defect detection unit for performing detection process andclassification process of defects from (based on) a partial imagecontaining the defect candidate extracted by the defect candidateextraction unit. The process performed by the defect candidateextraction unit and/or the process performed by the defect detectionunit is performed asynchronously with the image acquisition processperformed by the image acquisition means.

The present invention provides the pattern defect inspection apparatusand method. The process performed by the defect detection unit, theprocess performed by the defect candidate extraction unit, and the imageacquisition process performed by the image acquisition means, areperformed asynchronously with each other. The defect candidateextraction unit includes a memory that stores a partial image containingan extracted defect candidate and the feature amount of defectcandidate.

The image acquisition means according to the present invention includesa plurality of image sensors for performing an image acquisition processon a plurality of areas on the inspection target in a parallel manner.

The defect candidate extraction unit according to the present inventionperforms a defect candidate extraction process for a plurality of areason the inspection target in a parallel manner.

The defect detection unit according to the present invention performs adetection process and a classification process of defects in a parallelmanner based on a plurality of partial images containing a defectcandidate.

The defect candidate extraction unit according to the present inventionincludes a positional displacement detection section for calculating theamount of positional displacement between the detected image signal andreference image signal for each field unit, a brightness correctionsection for calculating the amount of signal correction for adjustingthe brightness difference between the detected image signal andreference image signal, for each area and an image comparison sectionfor performing a brightness comparison at corresponded positions betweenthe detected image signal and reference image signal by using thepositional displacement amount, which is calculated for the each fieldunit by the positional displacement detection section, and the signalcorrection amount, which is calculated for the each area by thebrightness correction section.

The present invention is such that the parallel processing counts forthe defect candidate extraction unit and defect detection unit are setas appropriate in accordance with the amount of image data acquired bythe image acquisition means.

The threshold value (inspection sensitivity) for the detection processand the classification process of the defects performed by the defectdetection unit according to the present invention is automatically setin accordance with feature amounts such as the brightness, contrast, andpattern density of a partial image containing defect candidate.

The defect detection unit according to the present invention includes acomparative collation section, which detects defects only by collatingthe feature amount of defect candidate, which is calculated by thedefect candidate extraction unit at the time of defect candidateextraction, with the feature amount of defect candidate, which iscalculated by the defect detection unit at the time of defect detection.

The threshold value for classifying defect candidates into a pluralityof types in the defect detection unit according to the present inventionis set for each of the partial images becoming a target (an object) forclassification.

The threshold value for classifying defect candidates into a pluralityof types in the defect detection unit according to the present inventionis calculated from a plurality of partial images.

The defect detection unit according to the present invention includes anoutput monitor section, which displays the results of the detectionprocess and the classification process of the defect.

The defect detection unit according to the present invention examinesthe defect candidate extraction results by performing multi-steppositional displacement detection processes, which vary in processingrange (processing unit) or processing method, and multi-step brightnesscorrection processes, which vary in processing range (processing unit)or processing method.

The present invention makes it possible to reveal ultramicroscopicdefects on an inspection target in which ultramicroscopic circuitpatterns are formed, and inspect the defects with high sensitivity andat a high speed.

Further, the present invention makes it possible to attain an inspectionspeed that corresponds to the processing speed, which is determined, forinstance, by the image sensor's image acquisition rate, imageaccumulation time, and scanning width.

These and other objects, features and advantages of the presentinvention will be apparent from the following more particulardescription of preferred embodiments of the invention as illustrated inthe accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates the configuration of one embodiment of a patterndefect inspection apparatus according to the present invention.

FIG. 2 illustrates a parallel process that a defect candidate extractionunit according to one embodiment of the present invention performs tocompare two images.

FIG. 3 illustrates a parallel process that a defect candidate extractionunit according to another embodiment of the present invention performsto compare two images.

FIG. 4A shows an inspection target image signal;

FIG. 4B shows a reference image signal; FIG. 4C shows a difference imagethat indicates the difference between the inspection target image signalshown in FIG. 4A and the reference image signal shown in FIG. 4B; andFIG. 4D shows a difference image signal waveform that prevails atlocations 1D-1D′ in FIG. 4C.

FIG. 5 illustrates information that is stored in a memory andtransferred to a defect detection unit in accordance with one embodimentof the present invention.

FIG. 6 shows an example of an image comparison process unit.

FIG. 7 shows a typical chip structure.

FIG. 8 illustrates a first embodiment according to the present inventionin which images are acquired by two image detection units (imageacquisition means) in a parallel manner.

FIG. 9 illustrates a second embodiment according to the presentinvention in which images are acquired by two image detection units(image acquisition means) in a parallel manner.

FIG. 10 illustrates individual fields for which the amount of positionaldisplacement between two images according to the present invention iscalculated to achieve alignment by pixel unit.

FIG. 11 illustrates processes that a defect candidate extraction unitand defect detection unit perform in accordance with one embodiment ofthe present invention.

FIG. 12 is a flowchart illustrating a process that a brightnesscorrection section according to one embodiment of the present inventionperforms to adjust brightness differences, which randomly arise.

FIG. 13A shows a detected image. FIG. 13B shows a reference image. FIGS.13C through 13E are scatter diagrams in which the brightness of adetected image is plotted along the X-axis and the brightness of areference image is plotted along the Y-axis.

FIG. 14 illustrates how the brightness correction amount is calculatedby a brightness re-correction section according to one embodiment of thepresent invention.

FIG. 15A shows a reference image. FIG. 15B shows area B of the referenceimage and its scatter diagram. FIG. 15C shows area C of the referenceimage and its scatter diagram.

FIGS. 16A1 and 16A2 show the images of a defect candidate at one samelocation. FIG. 16A3 shows an image that indicates a detection result.FIGS. 16B1 and 16B2 show the images of a defect candidate at one samelocation. FIG. 16B3 shows an image that indicates a detection result.

FIG. 17C1 shows the images of chips 1 and 2, which are compared by adefect candidate extraction unit 15. FIG. 17C2 shows a defect candidateimage and its reference image, which are compared by a defect detectionunit 16.

FIG. 18 illustrates how defects are classified by a defect detectionunit according to one embodiment of the present invention.

FIG. 19A shows a partial image containing defect A. FIG. 19B shows apartial image containing defect B. FIG. 19C shows a defect brightnesswaveform corresponding to FIG. 19A. FIG. 19D shows a defect brightnesswaveform corresponding to FIG. 19B.

FIG. 20A is a flowchart illustrating an automatic defect classificationprocess according to one embodiment of the present invention. FIG. 20Bis a brightness waveform diagram that is obtained in a case wherethreshold value TH0 is set in accordance with typical or standard defectC. FIG. 20C is a brightness waveform diagram that is obtained in a casewhere reference brightness value L is calculated from a reference image(background image) of typical or standard defect C for which thresholdvalue TH0 is set. FIGS. 20D and 20E are brightness waveform diagramsthat are obtained in cases where brightness value M is calculated fromreference sections of defects A and B, which are shown in FIGS. 19A and19B.

FIG. 21 illustrates how a defect detection result is reflected, forinstance, in threshold values for comparison processes that areperformed for defect candidate extraction and defect detection by adefect detection unit according to one embodiment of the presentinvention.

FIG. 22 is a flowchart illustrating an inspection condition optimizationprocess that is performed in accordance with one embodiment of thepresent invention.

FIG. 23 illustrates one embodiment according to the present invention inwhich an inspection process is performed two times by different methodsto collate the obtained two sets of information and reveal hiddendefects indicated by feeble signals.

FIG. 24 illustrates the configuration of another embodiment of a patterndefect inspection apparatus according to the present invention, whichdiffers from the one shown in FIG. 1.

FIG. 25 illustrates the configuration of still another embodiment of apattern defect inspection apparatus according to the present invention,which differs from those shown in FIGS. 1 and 24.

FIG. 26 illustrates a chip comparison method according to the presentinvention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Embodiments of the present invention will now be described in detailwith reference to FIGS. 1 through 20.

FIG. 1 illustrates the configuration of an optical visual inspectionapparatus that inspects semiconductor wafers in accordance with oneembodiment of the present invention. The optical visual inspectionapparatus includes a stage 12 and a detection unit (image acquisitionmeans) 13. The stage 12 moves while a sample (e.g., a semiconductorwafer or other inspection target on which a 0.1 μm or smallerultramicroscopic circuit pattern is formed) 11 is mounted on it. Thedetection unit 13 includes an illumination optical system 102 forcondensing the light emitted from a light source 101 and illuminatingthe condensed light on the sample 11, an image formation lens (objectivelens included) for forming an optical image that is reflected from thesample 11, and an image detection section 104, which includes an imagesensor for receiving the formed optical image and converting it into animage signal in accordance with its brightness and an analog-to-digitalconversion section for converting the input signal from the image sensorto a digital signal (a gradation signal). The image detection section104 includes one or more sets (104-1, 104-2).

In the example shown in FIG. 1, a lamp is used as the light source 101.Alternatively, however, a laser may be used as the light source 101. Thelight emitted from the light source 101 may have a narrowband shortwavelength. Alternatively, wideband wavelength light (white light) maybe used. If short wavelength light is used, ultraviolet light (UV light)may be used to raise the resolution of the image to be detected (todetect microscopic defects).

A time delay integration image sensor (TDI image sensor) may be used asthe image sensor 104. The TDI image sensor is formed by arranging aplurality of one-dimensional image sensors in a two-dimensional manner.When each one-dimensional image sensor detects a signal in synchronismwith the movement of the stage 12 and transfers the detected signal tothe next one-dimensional image sensor for addition purposes,high-sensitivity detection can be achieved at a relatively high speed.It goes without saying that a CCD linear sensor may alternatively beused as the image sensor 104.

The reference numeral 14 denotes an image editing section, whichincludes a preprocessing section 106 and an image memory 107. Thepreprocessing section 106 performs an image correction process on thedigital signal (the gradation signal) of the image detected by thedetection unit (image acquisition means) 13 to provide, for instance,shading and dark level corrections. The image memory 107 stores thedigital signal of a detected image targeted for comparison and thedigital signal of a reference image. The image editing section 14includes one or more sets (14-1, 14-2).

The write into the image memory 107 and the read from the image memory107 are performed at different times.

The reference numerals 15 and 16 denote a defect candidate extractionunit and a defect detection unit, respectively. These units perform adefect candidate extraction process on an acquired image and a detectionprocess/a classification process of defects on a partial imagecontaining defect candidates asynchronously with a detection process(image acquisition process) on an image from the image sensor that isperformed by the detection unit 13 and image editing section 14. Thedefect candidate extraction unit 15 and defect detection unit 16 willnow be described.

The defect candidate extraction unit 15 extracts a partial imagecontaining defect candidates within a wafer, which serves as the sample11, asynchronously with a detection process performed on an image fromthe image sensor. The defect candidate extraction unit 15 includes(comprises) one or more sets (15-1 and 15-2 within the configurationshown in FIG. 1). The defect candidate extraction unit 15 compares twodigital image signals (the digital signal of a detected image and thedigital signal of a reference image) that are stored in the image memory107 of the image editing section 14. If any difference value is greaterthan a threshold value, the corresponded portion is extracted as adefect candidate. First, the digital signal of a detected image and thedigital signal of a reference image, which are stored in the imagememory 107, are read. Then, a positional displacement detection section108 calculates the amount of positional displacement for positionaldisplacement adjustment purposes, and a brightness correction section109 calculates the amount of signal correction for the purpose ofadjusting the difference between the brightness of the detected image(brightness value) and the brightness of the reference image (brightnessvalue). An image comparison section 110 compares the correctedbrightnesses at the corresponded positions of the detected image andreference image digital signals (corresponded positions aligned by pixelunit in both images) by using the calculated positional displacementamount and signal correction amount. If any difference value of thecorrected brightness is greater than a predetermined threshold value,the corresponded portion is extracted as a defect candidate, and theamounts of feature (brightness value, dimensions, area, coordinates,difference from reference image, etc.) of the defect candidate arecalculated.

In other words, the image comparison section 110 compares the imagesignals of the detected image and reference image based on combining thedecomposition of the scatter diagram and spatial information of featureso as to mention later, by using, for instance, the calculatedpositional displacement amount. If any difference value between both theimage signals is greater than a predetermined threshold value, the imagecomparison section 110 extracts the corresponded portion as a defectcandidate and calculates the amounts of feature of the defect candidate.The image comparison section 110 then stores a partial image containingthe defect candidate, its reference image, the amounts of feature of thedefect candidate, and inter-image positional displacement amount in thememory 115. A threshold value setup section 111 sets a threshold value,which is used to extract defect candidates from difference values, foreach area within a chip, and then gives the threshold value to the imagecomparison section 110. The defect candidate extraction units 15-1, 15-2perform parallel processing by performing the same procedure.

The write into the memory 115 and the read from the image memory 115 areperformed at different times.

The defect detection unit 16 detects defects from defect candidatesextracted by the defect candidate extraction units 15 and classifies thedetected defects according to the amounts of feature. The defectdetection unit 16 also performs the above detection/classificationprocess asynchronously with a detection process that is performed on animage fed from the image sensor. Therefore, the defect detection unit 16includes (comprises) one or more sets (16-1 and 16-2 within theconfiguration shown in FIG. 1), as is the case with the defect candidateextraction unit 15. The defect detection unit 16 reads the digitalsignal of a partial image containing defect candidates and the digitalsignal of its reference image, which are stored in the image memory 115.A positional displacement re-detection section 116 recalculates theamount of positional displacement. A brightness re-correction section117 calculates the amount of signal correction for adjusting thedifference between the brightness of the detected image (brightnessvalue) and the brightness of the reference image (brightness value). Animage re-comparison section 118 compares the corrected brightnesses atthe corresponded positions of the detected image and reference imagedigital signals (corresponded positions aligned by pixel unit in bothimages) by using the calculated positional displacement amount andsignal correction amount. If any difference value of the correctedbrightness is greater than a predetermined threshold value, the imagere-comparison section 118 extracts the corresponded portion as a defect,and calculates the amounts of its feature. A defect classificationsection 119 collates the amounts of the feature of the defect candidate,such as a brightness value, dimensions, area, coordinates, anddifference with reference image, and the amount of positionaldisplacement between both images calculated by the defect candidateextraction unit 16, with the similar amounts of feature of the defectportion and of positional displacement between both images that arecalculated by the defect detection unit 15, and judges whether a defectcandidate is a true defect or a false-information. True defects will beclassified into a plurality of categories. The defect classificationsection 119 automatically sets a classification threshold value asneeded for each defect image. The defect detection units 16-1, 16-2perform parallel processing by performing the same procedure.

An overall control section 17 includes (comprises) a user interfacesection 112, which includes display means and input means for receivinga user's request for changes in inspection parameters (e.g., a thresholdvalue for image comparison) and displaying detected defect information;a storage device 113 for storing, for instance, the amounts of featureand images of the detected defect candidate; and a CPU (incorporated inthe overall control section 17) for exercising various controlfunctions. A mechanical controller 114 complies with a control commandfrom the overall control section 17, to drive and control, for example,the stage and optical components incorporated in detection unit 13. Thedefect candidate extraction units 15-1, 15-2 and defect detection units16-1, 16-2 are also driven in accordance with a command from the overallcontrol section 17.

As shown in FIG. 6, a large number of chips having the same pattern areregularly arranged on a semiconductor wafer 11 that is to be inspected.In the inspection apparatus shown in FIG. 1, the overall control section17 uses the stage 12 to continuously move the semiconductor wafer 11,which is a specimen. In synchronism with such movement, the detectionunit 13 sequentially acquires a chip image. The same positions of twoadjacent chips are compared two times. More specifically, the digitalimage signals, for instance, of areas 61 and 62 in FIG. 6 are extractedas a detected image and a reference image, respectively, and comparedtwo times in the above-mentioned sequence. Any difference encountered asa result of comparison is detected as a defect and then classified.

When the inspection apparatus according to the present invention isconfigured to incorporate two image detection sections 104-1, 104-2 andperform an image pickup process in a parallel manner, it is possible, asshown in FIGS. 8 and 9, to pick up images at different positions, whichare formed by an image formation lens 103. FIG. 8 shows a case where twoimage sensors 104-1, 104-2 are arranged in a direction crossing (e.g.,perpendicular to) the advance direction (the scanning direction) ofstage to achieve image acquisition and analog-to-digital conversion in aparallel manner for the purpose of picking up the image of an inspectiontarget chip 1 and the image of a reference chip 2, which is to becompared with the inspection target chip 1. FIG. 9 shows a case wheretwo image sensors 104-1, 104-2 are arranged in the advance direction ofstage with a spacing interval equivalent to one chip provided betweenthe image sensors to achieve image acquisition in a parallel manner,that is, acquire the image of chip 1 with image sensor 1 and the imageof chip 2 with image sensor 2 and achieve analog-to-digital conversion.

As described above, when a plurality of image detection sections 104 areprovided to perform a parallel operation, image acquisition can beaccomplished at a high speed without regard to the image sensorprocessing speed. The images acquired by the image sensors 104-1, 104-2are processed respectively by the image editing sections 14-1, 14-2 andstored respectively in the image memories 107-1, 107-2. It goes withoutsaying that the image detection section 104 and image editing section 14may each include as one set.

The defect candidate extraction unit 15 and defect detection unit 16according to the present invention perform the process for extractingdefect candidates from an acquired image and the process for detectingdefects from a partial image containing defect candidates andclassifying the detected defects. These processes are performedasynchronously with the process for detecting images from the imagesensors and will now be described with references to FIGS. 2 and 3. Itgoes without saying that the process of the defect candidate extractionunit 15 may be performed asynchronously with the process of the defectdetection unit 16. FIG. 2 illustrates a first embodiment and indicateshow an image acquired by one image detection section (image sensor)104-1 is processed. In the embodiment to be described, imagessequentially acquired by the image detection section 104-1 and stored inthe image memory 107-1 are processed in a parallel manner by two defectcandidate extraction units 15-1, 15-2. These stored images indicate thecorresponded locations of chips 1, 2, 3, and so on. Defect candidateextraction unit 15-1 reads the images of chips 1 and 2 from the memory107-1 and performs the above-mentioned series of processing steps toextract defect candidates. In parallel with such defect candidateextraction, defect candidate extraction unit 15-2 reads the images ofchips 2 and 3 from the memory 107-1 and performs a series of processingsteps to extract defect candidates. Defect candidates whose coordinatesin units 15-1 and 15-2 agree with each other are extracted as defectcandidates of chip 2. A partial image of chip 2, which contains detecteddefect candidates, and either or both of the corresponded partial imagesof chips 1 and 3 are stored in memory 115 as reference images. In thisinstance, memory 115 also stores, for example, the amount of positionaldisplacement between images for comparison and the amount of feature ofdefect candidate. Subsequently, defect candidate extraction unit 15-1reads the images of chips 4 and 5 from memory 107-1 and performs theabove-mentioned series of processing steps to achieve defect candidateextraction. In parallel with such defect candidate extraction, defectcandidate extraction unit 15-2 reads the images of chips 5 and 6 frommemory 107-1 and performs a series of processing steps to achieve defectcandidate extraction. Defect candidates whose coordinates in units 15-1and 15-2 agree with each other are extracted as defect candidates ofchip 5. A partial image of chip 5, which contains detected defectcandidates, and either or both of the corresponded partial images ofchips 4 and 6 are stored in memory 115 as reference images.

As described above, even when the processing speed of the defectcandidate extraction unit is half the sensor's image acquisitionprocessing speed, defect candidate extraction can be achieved insynchronism with the sensor's image acquisition. Further, the imagepickup process and defect candidate extraction process may be performedasynchronously with each other when image memory 107 is used as anintervening device.

FIG. 3 illustrates a second embodiment and indicates image processingsteps that are performed to detect defects from a partial imagecontaining extracted defect candidates and classify the detecteddefects. The reference numeral 3-b in FIG. 3 denotes a partial imagecontaining defect candidates that are extracted because theircoordinates in units 15-1 and 15-2 agree with each other. The referencenumerals 3-a and 3-c denote partial images that correspond to partialimage 3-b. After partial image 3-b, either or both of partial images 3-aand 3-c, the amount of feature, and the amount of positionaldisplacement are stored in memory 115, the defect detection unit 16reads two partial images (3-b and 3-a or 3-b and 3-c) or three partialimages (3-b, 3-a, and 3-c), the amount of feature, and the amount ofpositional displacement from memory 115 and performs a series ofprocessing steps. The inspection apparatus according to the presentinvention includes three defect detection units 16-1, 16-2, 16-3. Thesedefect detection units are configured so as to perform parallelprocessing. As regards a partial image that contains defect candidatesand is to be temporarily stored in memory 115, the overall controlsection 17 monitors the operations of the three defect detection units,and exercises control so that processing is performed by a defectdetection unit that is not engaged in arithmetic processing (is waitingfor data). This ensures that the defect detection process and defectclassification process are performed efficiently at a high speed. In thepresent embodiment, memory 115, which stores a partial image containingdefect candidates, the corresponded reference image, and the amount offeature, is common in the two defect candidate extraction units 15-1,15-2. Alternatively, however, each of the two defect candidateextraction units may possess such a memory or may not possess such amemory. When memory 115 is used as an intervening device, the defectcandidate extraction process can be performed asynchronously with thedefect detection process and defect classification process. However, ifno such memory is available, the defect detection and defectclassification processes are performed in real time and in synchronismwith the defect candidate extraction process.

FIG. 5 shows one embodiment of information that is stored in memory 115and transferred to the defect detection unit 16. Partial image sets 3-a(reference images 1, 2, and so on) and 3-b (defect images 1, 2, and soon), which both contain defect candidates, are serially numbered(assigned defect candidate numbers). Memory 115 stores the featureamounts (defect candidate detection position (X,Y) in chip, brightnessvalue, area, and X- and Y-direction dimensions) corresponded with theserial numbers, and X- and Y-direction positional displacement amountsof both images, with partial images (3-a and 3-b) containing defectcandidates.

Even if the image acquisition process differs in processing speed fromthe process for extracting defect candidates from an acquired image,that is, the processing speed of the defect candidate extraction unit 15is lower than the speed of target chip image acquisition by the imagesensor 104 and the speed of image editing, the inspection speed can besynchronized with the acquisition speed of the image sensor 104 byallowing a plurality of defect candidate extraction units 15 to performparallel processing. Further, when a partial image containing defectcandidates extracted by the defect candidate extraction unit 15 isreprocessed in a parallel manner by a plurality of defect detectionunits 16, the defect detection process and defect classification processcan be performed in real time even if the processing speed of the defectdetection unit 16 is lower than that of the defect candidate extractionunit 15. As a result, the inspection/classification speed can besynchronized with the acquisition speed of the image sensor 104. If, forinstance, the result of calculations performed, for instance, on theamount of acquired light indicates that the maximum image acquisitionspeed of the image sensor 104 is 3.2 Gpps (pps: pixels per second), aninspection processing speed of 3.2 Gpps can be attained by using theconfiguration described above even in a situation where the processingspeed of the defect candidate extraction unit 15 is half the maximumimage acquisition speed of the image sensor 104, that is, 1.6 Gpps.Further, even if the processing speed of the defect detection unit 16 ishalf the processing speed of the defect candidate extraction unit 15,that is 0.8 Gpps, the use of the configuration described above makes itpossible to attain an inspection processing speed of 3.2 Gpps. Even whenthe speed of the image sensor 104 is higher than indicated above, thesame result can be obtained by allowing an increased number of defectcandidate extraction units 15 and defect detection units 16 to performparallel processing on the acquired image signal. Further, the sameresult can also be obtained even if the image acquisition width of theimage sensor 104 is increased. Furthermore, even if the inspection imagemagnification is increased (the magnification of the image formationlens 103 is increased) to provide higher inspection sensitivity, thesame inspection speed as for the previously employed magnification canbe maintained by allowing the employed configuration to include anincreased number of defect candidate extraction units 15 and defectdetection units 16.

The embodiment described above assumes that the image sensor 104generates a single output. However, even if the image sensor 104 has aplurality of output terminals and outputs a plurality of signals in aparallel manner, signal processing can be performed in the same manneras described in conjunction with the embodiment described above toperform image processing at a higher speed. In such an instance, theimage sensor 104 has a plurality of signal lines, which are connectedrespectively to a plurality of analog-to-digital converters 105. Theoutputs generated by these analog-to-digital converters 105 enter theimage editing section 14 in which processing is performed in a sequencedescribed above.

The processes performed by the defect candidate extraction unit 15 anddefect detection unit 16 will now be described with reference to FIG.11. First of all, the detected image signal (the image signal of chip 2in the example shown in the figure) and the reference image signal (theimage signal of chip 1 in the example shown in the figure), which aresuccessively input into memory 107 in synchronism with the movement ofthe stage 12, are read. The image signals of these two chips do notrepresent the same location at all if the stage 12 vibrates or the wafermounted on the stage is tilted. Therefore, the positional displacementdetection section 108 calculates the amount of positional displacementbetween the two images (hereinafter referred to as the positionaldisplacement amount). The calculation of the positional displacementamount performs specific length in the advance direction of a stage oneby one as one processing unit. The reference numerals 51 and 52 in FIG.10 respectively denote a processing area for a situation where length D(pixel) is one processing unit. This unit processing area is hereinafterreferred to as a field.

As described above, the positional displacement detection section 108calculates the amount of positional displacement between field 51 andits corresponding adjacent chip field, and then calculates the amount ofpositional displacement between field 52 and its corresponding adjacentchip field. In other words, the positional displacement detectionsection 108 sequentially calculates the positional displacement amountfor each field unit in response to an entered image. The positionaldisplacement amount may be calculated by various methods. For example,the positional displacement amount may be calculated by inter-imagenormalized cross-correlation, inter-image density difference summation,or inter-image density difference sum-of-squares calculation. Any ofthese methods will do. In accordance with the calculated positionaldisplacement amount, the positions of two images are then aligned foreach field unit.

If the aforementioned image sensor 104 is connected to a plurality ofanalog-to-digital converters 105 via a plurality of signal lines and theoutputs generated by the A/D converters enter the image processingsection 14, positional displacement amount calculation for each fieldunit and positional alignment are both performed in a parallel manner.The unit of parallel processing, which is performed with divisionsprovided in a direction nearly perpendicular to the advance direction ofstage, is hereinafter referred to as a channel. To achievehigh-precision positional alignment on an individual channel basis, itis possible to extract only high-reliability positional displacementamounts (e.g., those having a high correlation coefficient) from thosecalculated on an individual channel basis, add up a plurality of sets ofextracted positional displacement information, and calculate thepositional displacement amount of a low-reliability channel. In oneembodiment, all the channels are examined so that the positionaldisplacement amount of the highest-reliability channel is regarded asthe positional displacement amount of a low-reliability channel.Further, a plurality of sets of high-reliability positional displacementinformation are added up to calculate a positional displacement amountthat is common to all channels and use the calculation result as thepositional displacement amount of each channel. It is also possible tocalculate the positional displacement amount of a low-reliabilitychannel by performing an interpolation or extrapolation process on thepositional displacement amounts of a plurality of high-reliabilitychannels. The interpolation or extrapolation process may be performed bymeans of linear interpolation or by means of spline approximation orother curve approximation. This ensures that even when a limited amountof pattern information is available from a channel for positionaldisplacement amount calculation, it is possible to effect positionalalignment in accordance with an image distortion arising, for instance,out of stage vibration.

Next, the brightness correction section 109 calculates a signalcorrection amount for adjusting a brightness difference between twopositionally aligned images. Brightness differences may arise due, forinstance, to (1) a slight film thickness difference of semiconductorwafer chips to be inspected, (2) sensitivity differences among imagesensor pixels, (3) light amount differences accumulated in the imagesensor by stage speed irregularities, and (4) changes in the amount ofillumination light. Difference (1) arises randomly depending on thesemiconductor wafer pattern. Differences/changes (2), (3), and (4) arespecific to the employed inspection apparatus and generate in line formor stripe form on the detected image signal. The present inventionadjusts any brightness difference that arises due to (1), (2), (3), or(4). The brightness difference adjustment sequence according to oneembodiment is shown in FIG. 12.

First, step 12-1 is performed to calculate the feature amounts of eachcorresponding pixel for each specific field and form a two- ormore-dimensional feature (characteristics) space. This step is performedfor both the detected image and reference image. Any feature amountswill do as far as they indicate the pixel feature, including segments ofpixel contrast, brightness, secondary differential value, gradation(gray scale) difference between corresponded pixels, and dispersionvalue (variation value) used neighboring pixel. Next, step 12-2 isperformed to divide the feature space into a plurality of segments. Step12-3 is then performed to calculate the correction amount for eachsegment by using the statistics of pixels belonging to each segment.This is the same as for preparing a scatter diagram in which the X-axisand Y-axis indicate the detected image brightness and reference imagebrightness, respectively, to depict the pixels within the detected image(FIG. 13A) and reference image (FIG. 13B) areas as indicated in FIG.13C, dividing the scatter diagram into FIGS. 13D, 13E, and so on inaccordance with the feature amounts, and calculating the correctionamounts within each resulting scatter diagram. As regards the correctionamounts for the scatter diagrams, which are obtained by dividing thefeature space into segments, a linear expression is determined, asindicated in FIGS. 13D and 13E, by least squares approximation within ascatter diagram. The gradient and y-intercept are used as the correctionamounts. The field for forming the feature spaces can be arbitrarily setas far as it is 1×1 pixel or larger. However, if a 1×1 pixel field,which represents the highest frequency, is used for correction purposes,defects will also be united (be corrected) together. Therefore, thefield for forming the feature spaces needs to set as a little large areafrom the 1×1 pixel field. The method for detecting defect candidates bycomparing based on using scatter diagrams that are obtained from thedetected image and reference image is disclosed by Japanese PatentsLaid-open No. 2002-168799 and No. 2003-271927.

Next, the image comparison section 110 calculates the threshold valuesfor accepting the calculated positional displacement amount andbrightness difference about each pixel of the detected image andreference image, and compares the brightness values of the detectedimage and reference image on the basis of the threshold values. If anypixel has a brightness difference greater than a threshold value, theimage comparison section 110 extracts the pixel as a defect candidateand its partial image. In this instance, the defect candidate pixelposition (detection position), brightness value, dimensions, referenceimage brightness, and the like are calculated as feature(characteristics) amounts as shown in FIG. 5. The threshold values usedfor comparison are to be set by the user as one inspection condition andautomatically tuned by the threshold value setup section 111.

In the present embodiment, the image signals of chips 3 and 2 are alsosubjected to the same parallel process. Defect candidates found betweenchips 1 and 2, which are detected by defect candidate extraction unit15-1, and defect candidates found between chips 2 and 3, which aredetected by defect candidate extraction unit 15-2, are then examined tolocate defect candidates whose coordinates match. An AND process (1101in FIG. 11) is performed while the located defect candidates are handledas defect candidates of chip 2. The partial images, feature(characteristics) amounts, and positional displacement amounts of suchdefect candidates are transferred to the defect detection unit 16 viamemory 115.

Next, the defect detection unit 16 (positional displacement re-detectionsection 116) performs a positional displacement detection/positionalalignment process by using the images and feature amounts of the defectcandidates transferred. The positional displacement detection methodemployed by the positional displacement re-detection section 116 can bethe same as or different from that is employed by the positionaldisplacement detection section 108. It is also possible to effectpositional alignment only by using the positional displacement amountcalculated by the positional displacement detection section 108 andwithout performing a positional displacement re-detection process.

Next, a brightness correction process is performed (brightnessre-correction section 117). It does not matter whether the employedbrightness correction method is the same as that is used by thebrightness correction section 109. The use of a different brightnesscorrection method according to one embodiment of the present inventionwill now be described with reference to FIG. 14. First of all, step117-1 is performed to divide the extracted reference image into aplurality of areas in accordance with the pattern. Step 117-2 is thenperformed to calculate the correction amounts for each area by using thestatistics of pixels belonging to each area. This is the same as fordividing the reference image shown in FIG. 15A into area B (slash areain FIG. 15B) and area C (slash area in FIG. 15C), preparing theirrespective scatter diagrams in which the X-axis and Y-axis indicate thebrightness of a partial image containing defect candidates and thebrightness of its reference image, respectively, to depict the pixelswithin the areas, and calculating the correction amounts within eachresulting scatter diagram. As regards the correction amounts for thescatter diagram for each area, a linear expression is determined, asindicated in FIGS. 15B and 15C, by least squares approximation within ascatter diagram. The gradient and y-intercept are used as the correctionamounts. Although the method for dividing defect candidates according tothe pattern has been described above, the method shown in FIG. 12 mayalternatively be used in conjunction with the present embodiment toprovide more detailed brightness corrections than indicated in FIG. 12.This makes it possible to provide corrections separately for theperipheral circuit section 72 being an area that a false-information (afalse-report) tends to generate brightly and for the memory mat section71 as shown in FIG. 7. The areas can be defined in accordance with chipdesign information such as CAD data, chip layout data, and chip image orin accordance with test inspection results. Further, the areas can alsobe automatically defined in accordance with input image information.

Next, the image re-comparison section 118 calculates the thresholdvalues for accepting the calculated positional displacement amount andbrightness difference amount for each pixel, as is the case with theimage comparison section 110, and compares the brightness values of thedefect candidate image and its reference image on the basis of thethreshold values. If any pixel has a brightness difference greater thana threshold value, the image re-comparison section 118 extracts thepixel as a defect pixel, and calculates the feature amounts in the samemanner as the image comparison section 110. It does not matter whetherthe threshold values used for comparison are the same as for the imagecomparison section 110 or individually set by the user. It is alsopossible to repeatedly perform the processes of sections 116 to 119 andconduct a tuning operation while viewing the detection results. Analternative is to perform automatic setup for each image. The method forperforming automatic setup will be described later.

The image re-comparison section 118 also collates the positionaldisplacement amounts and feature amounts calculated by the defectcandidate extraction unit 15 with those calculated by the defectdetection unit 16.

In the image re-comparison section 118, the collation of defectcandidate detection results of the same location, which are calculatedby the defect candidate extraction unit 15 and defect detection unit 16,will now be described in accordance with the first embodiment and withreference to FIGS. 16A1 through 16B3. FIGS. 16A1 and 16A2 respectivelyindicate the positional displacement amounts that are calculated asdefect candidate detection results of the same location by the defectcandidate extraction unit 15 and defect detection unit 16. White clearportions in the drawings represent defect areas in which the positionaldisplacement amount is greater than the threshold value. When thepositional displacement amounts of the defect image and reference image,which are calculated by the defect candidate extraction unit 15 anddefect detection unit 16, differ from each other, the defect candidatesshown in FIG. 16A1 are not extracted as defect areas in FIG. 16A2. Inthis instance, the defect candidates are not extracted as defectsbecause it is concluded that the positional displacement amountcalculated by the positional displacement detection section 108 of thedefect candidate extraction unit 15 is incorrect.

FIGS. 16B1 and 16B2 respectively indicate the feature amounts that arecalculated as defect candidate detection results of the same location bythe defect candidate extraction unit 15 and defect detection unit 16.White clear portions in the drawings represent defect areas in which thebrightness difference is greater than the threshold value. In thisinstance, the detection positions are collated with each other as onefeature amount. If they do not match, the corresponded defect candidateis not extracted as a defect.

In the image re-comparison section 118, the collation of defectcandidate detection results of the same location, which are calculatedby the defect candidate extraction unit 15 and defect detection unit 16,will now be described in accordance with the second embodiment and withreference to FIGS. 17C1 and 17C2. FIG. 17C1 shows the images of chips 1and 2, which are compared by the defect candidate extraction unit 15. Itillustrates an example in which a defect candidate exists in chip 1. Acase where an isolated defect in a sparse pattern area is extracted as anonfatal defect will now be described. Whether or not a specific defectcandidate is a fatal defect or nonfatal defect is determined by judgingfor a circuit pattern (wiring pattern, etc.) behind the defectcandidate. At a stage where the defect candidate extraction unit 15performs an image comparison process, it is unknown whether a defectcandidate is contained in chip 1 or 2. In other words, it is unknownwhich chip provides a background image. Therefore, when the backgroundpattern information is to be acquired, chips 1 and 2 should be both usedto determine the average as shown in FIGS. 17C1 and 17C2. Consequently,the reliability is low and no accurate judgment can be formed. However,FIG. 17C2 shows the defect candidate image and its reference image,which are compared by the defect detection unit 16. At this stage, it isknown whether a defect is contained in chip 1 or 2. It is thereforepossible to accurately acquire the background circuit patterninformation and judge whether a defect candidate is a fatal defect ornonfatal defect.

As described above, highly reliable results can be obtained when thespecimen to be inspected is subjected to multi-step positionaldisplacement detection processes, which vary in processing unit orprocessing method, and multi-step brightness correction processes, whichvary in processing unit or processing method, and the results of suchprocesses are collated with each other. When, for instance, a circuitpattern formed on a semiconductor wafer, which is covered with anoptically transparent, flat insulation film, is to be inspected after aCMP process, the wafer image, which has been subjected to the CMPprocess and picked up by the detection unit 13, is affected, forinstance, reflected light distribution generating by insulation filmthickness variations in the wafer plane and by the roughness andfineness of pattern in chip. Therefore, the wafer image has variationsin brightness depending on the wafer location. When the image, which hasthe variations in brightness, is subjected to multi-step brightnesscorrection processes, defects can be revealed while the influence ofinter-image brightness variations is reduced. As a result, the defectdetection rate can be increased. Further, when the image obtained afterthe AND process is performed by the defect candidate extraction unit 15,that is the image which is performed re-processing and re-judgment byusing the image whose defect position and background area are known, itis possible to acquire more accurate pattern information and form ahighly reliable judgment.

As described above, two comparison results are collated with each otherto remove any false-information, and then the defect classificationsection 119 classifies defects into one or more categories by theirfeature (characteristics) amounts. One embodiment of a classificationprocess is shown in FIG. 18. A first step is performed to check whetherthe feature amounts of defects, which are calculated from the defectimage and reference image, meet the predefined classification conditions(hereinafter referred to as a classification rule). Defects satisfyingthe predefined classification conditions are then classified into onecategory. If there is any defect that does not fall under any category,it may be excluded and labeled as nondefective. The threshold valuesused with the classification rule (e.g., TH1, TH2, TH3, and TH4 in FIG.18) are to be manually set by the user while viewing the feature amountsof each defect. An alternative is to sample a certain number of defectimages and automatically calculate the statistical threshold values foruse with the classification rule. Another alternative is toautomatically calculate the threshold values appropriate for each defectimage. FIGS. 19A and 19B illustrate the calculations of classificationthreshold values for each defect image. FIGS. 19A and 19B show partialimages containing detected defects A and B, respectively. FIGS. 19C and19D show defect brightness waveforms that correspond to FIGS. 19A and19B, respectively.

FIG. 19A is dark overall. As shown in FIG. 19C, the brightness value ofdefect A is small. Defect B in FIG. 19B, on the other hand, has a greatbrightness value as shown in FIG. 19D; however, the peripheralbrightness value is also great. For explanation purposes, it is assumedthat the classification conditions are as indicated below:

[Classification Conditions]

-   -   if defect brightness>TH then defect else false-information        To avoid picking up background noise from an image shown in FIG.        19B, it is necessary that threshold value TH1 be greater than        the background noise level (TH1 in FIGS. 19C and 19D). In such        an instance, however, defect A is excluded as a        false-information because it is smaller than threshold value        TH1.

To solve the above problem, the present invention automatically sets bycalculating the judgment conditions (inspection sensitivity) usingdetection and classification of defect (background conditions ofreference portion (brightness, contrast, pattern density, and otherfeature amounts)) for each partial image containing defects or defectcandidates (automatic defect classification based on floating judgmentconditions (threshold value)). FIG. 20A shows the correspondedprocessing flowchart according to one embodiment of the presentinvention. First of all, step 201 is performed to set threshold valueTH0, which serves as the base (for performing proper defectclassification for typical or standard defect C). Threshold value TH0may be calculated from a statistical value of defect portions on aplurality of wafers (this statistical value serves as a typical orstandard defect section value) or experimentally set as a typical orstandard value by the user. FIG. 20B shows an example in which thresholdvalue TH0 is set in accordance with the image of typical or standarddefect C. Next, step 202 is performed to calculate the referencebrightness value (average brightness value) L of the reference portioncorresponding to the typical or standard defect portion that has beenused for TH0 calculation. FIG. 20C shows an example in which thereference brightness value L is calculated from the reference image(background image) of typical or standard defect C, which has been usedfor TH0 setup. Step 203 is then performed to calculate the brightnessvalue M of the reference section for each defect image. FIGS. 20D and20E show examples in which the brightness value M is calculated from thereference sections for defects A and B, which are shown in FIGS. 19Athrough 19D. Finally, step 204 is performed to calculate the thresholdvalues TH for individual defects from the relationship between thereference brightness value L of the reference portion, which has beendetermined from an image that has been used for TH0 setup, and thebrightness value M that is calculated from the reference portions ofindividual defects. Equation (1) is used as one embodiment of a methodfor determining the threshold values TH from the relationship betweenthe values L and M.TH=TH0−(L−M)  Equation (1)

As described above, the classification threshold values (inspectionsensitivity) TH are automatically set for each defect or defectcandidate image. This applies to the threshold values for variousfeature amounts (brightness, contrast, pattern density, etc.). Ahigh-sensitivity inspection can then be conducted on the entire wafersurface even when the brightness greatly varies from a central chip on asemiconductor wafer to a peripheral chip.

The defect detection results obtained by the defect detection unit 16according to the present invention as described above are furtherreflected in the threshold values for the comparison process for defectcandidate extraction and defect detection. Its embodiment will now bedescribed with reference to FIG. 21. First, the user sets up generalconditions (step 21-1) and conducts a trial inspection (step 21-2). Thetrial inspection ranges from defect candidate extraction to detectionand classification of defect. Step 21-3 is then performed to display aclassification result list. The displayed list indicates afalse-information percentage as well as the brightness differences fromthe reference portions of candidates that are labeled as afalse-information. While viewing the listed information, the user resetsthe threshold values (step 21-4) and may repeat only the defectdetection process and defect classification process, which are performedby the defect detection unit 16, or repeat the defect candidateextraction process, which is performed by the defect candidateextraction unit 15, and subsequent processes. Further, it is possible tochange not only the comparison process threshold values but also theoptical conditions (light amount, polarization conditions, focalposition, etc.) while viewing the displayed classification result list(step 21-5). The inspection conditions are then optimized to initiate aninspection (step 21-6).

FIG. 22 is a flowchart illustrating the condition optimization process.The pattern inspection apparatus according to the present inventionincludes a memory 107 for storing the detected images of all chips and amemory 115 for storing a partial image containing all defect candidatesand its reference image. It is therefore possible to achieveoptimization by repeating the process under various defectdetection/defect classification conditions. It is also possible toachieve optimization by repeating the process under various defectcandidate extraction conditions. Further, the optical conditions canalso be optimized based on evaluating tuned detection/classificationresults.

In an inspection for comparing two images and detecting defects from thedifferences between the compared two images, the present inventionenhances the image acquisition speed by operating a plurality of unitsto perform parallel processing for image detection by the image sensor104 as described above. Further, the present invention can attain aninspection speed that is equivalent or close to the image acquisitionspeed of the image sensor 104 by operating a plurality of units toperform parallel processing for image comparison based defect candidateextraction and operating a plurality of units to perform parallelprocessing for detecting defects only from defect candidates andclassifying detected defects. If, for instance, the maximum imageacquisition speed of the image sensor 104 is 3.2 Gpps (pps: pixels persecond), an inspection speed of 3.2 Gpps can be attained by operatingtwo parallel units as provided by the present invention even if theprocessing capacity of the defect candidate extraction unit 15 is halfthe maximum image acquisition speed, that is, 1.6 Gpps. Further, even ifthe image sensor's image acquisition speed is higher than mentionedabove, the employed optical conditions shorten the image sensor's imageaccumulation time, or the image acquisition speed is otherwiseincreased, the resulting situation can be properly corresponded withouthaving to increase the processing speed as far as M sets of the defectcandidate extraction unit 15 and N sets of the defect detection unit 16are used. For example, even if the image sensor's image acquisitionspeed is further raised up to 6.4 Gpps, the resulting situation can beproperly corresponded at an image processing speed of 6.4 Gpps when foursets of the defect candidate extraction unit 15 having a processingcapacity of 1.6 Gpps are operated in a parallel manner. Even if themagnification is further increased to inspect patterns that areincreasingly rendered microscopic, a higher speed can be attained simplyby increasing the number of image sensors and various component units tobe operated in a parallel manner.

Unlike a comparative inspection in which there are inter-chip brightnessdifferences (color differences) that are caused by various factors,including inter-chip film thickness differences, light amountdifferences accumulated based on irregularity of stage-speed, andillumination variations, the inspection can be performed two times byusing a plurality of different methods. When a plurality of informationderived from such different inspections are collated with each other toreveal feeble signal defects that are hidden behind intense brightnessirregularities, high inspection reliability and sensitivity can beachieved.

Thereby, as shown in FIG. 23, a high-speed, high-sensitivity comparativeinspection can then be conducted by allowing the defect candidateextraction unit 15 to perform a high-sensitivity with a lower thresholdvalue and rough high-speed inspection for the images of all chips, andto narrow down the target area from all chips by extracting partialimages of many defect candidates including false-information, andallowing the defect detection unit 16 to perform a detailedinspection/classification (defect detection/defect classification)process within the resulting narrowed limited area.

The processes performed by the defect candidate extraction unit 15 anddefect detection unit 16 according to the present invention, which havebeen described above, are implemented by allowing the CPU to performsoftware processing. However, the core of computations such asnormalized correlation computation and feature space formation mayalternatively be performed by hardware such as an LSI. The processingspeed can be further increased by the use of such hardware. Further, thepresent invention can detect defects ranging in size from 10 nm to 90 nmeven if the difference in large brightness is between the dies to becompared due to delicate differences in the pattern film thickness aftersmoothing process such as CMP etc. and due to the use ofshort-wavelength illumination light.

The pattern inspection apparatus according to the present inventionincludes a memory 107 for storing the detected images of all chips and amemory 115 for storing a partial image containing all defect candidatesand its reference image. Therefore, the detection unit 13, defectcandidate extraction unit 15, and defect detection unit 16 operateasynchronously with each other and can be separately installed. In aclean room where a semiconductor inspection is conducted as indicated inFIG. 24, for example, only the stage 12, detection unit 13, and defectcandidate extraction unit 15 may be installed so that the defectdetection unit 16 installed outside the clean room performs a defectdetection/defect classification process off-line. Alternatively, onlythe stage 12 and detection unit 13 may be installed in the clean room asindicated in FIG. 25 so as to perform the subsequent processes off-lineoutside the clean room. Another alternative is to detect the image ofone specimen in a parallel manner while tuning the defect candidateextraction, defect detection, and defect classification processconditions for another specimen.

The chip comparison method according to the present invention is suchthat chip B, which is at a wafer edge (periphery), is first comparedwith chip A and then compared with chip C as shown in FIG. 26 to performan AND operation on the comparison results. Therefore, chips at a waferedge can also be inspected.

The comparative inspection apparatus according to the present inventioncan perform an inter-cell comparative inspection while conducting aninter-chip comparative inspection.

When a low-k film inspection is conducted on a SiO₂ film, SiOF film, BSGfilm, SiOB film, porous silica film, or other inorganic insulation filmor methyl-SiO₂ film, MSQ film, polyimide film, parylene film, amorphouscarbon film, or other organic insulation film, the pattern inspectionmethod according to the present invention can detect defects ranging insize from 20 nm to 90 nm no matter whether any local brightnessdifference is caused by in-film refractive index distribution variation.

One embodiment of the present invention has been described withreference to comparative inspection images handled by an optical visualinspection apparatus that inspects semiconductor wafers. However, thepresent invention can also be applied to comparative images forelectron-beam pattern inspection. Further, the inspection target (thesample) is not limited to semiconductor wafers. For example, the presentinvention can also be applied to TFT substrates, photomasks, and printedcircuit boards as far as defects are inspected for by comparing images.

The present embodiment, which has been described above, performsparallel processing for image comparison purposes and attains aninspection speed that corresponds to the processing speed, whichdepends, for instance, on the image sensor's image acquisition speed,image accumulation time, and scanning width.

Even when the same pattern in different images varies in brightnessbecause, for instance, the film thickness of the semiconductor wafer tobe inspected varies, the amount of illumination light varies, the imagesensor sensitivity varies from one pixel to another, or the light amountaccumulation time varies, the present embodiment preventsfalse-information from being generated by such brightness variations andproperly detects defects.

The images to be compared vary in brightness due, for instance, tointer-chip brightness differences (color irregularities), which arise,for instance, out of inter-chip film thickness differences, inter-pixelimage sensor sensitivity differences, accumulated light amountdifferences caused by stage speed irregularities, and illuminationvariations. In such a circumstance, the present embodiment adjusts theimage brightness with a plurality of different frequencies to reveal anddetect feeble signal defects, which are hidden behind intense brightnessirregularities.

The present embodiment can set a threshold value in accordance withintra-wafer coordinates and intra-chip coordinates. The inspectionsensitivity can then be automatically optimized at various locations.Therefore, a high-sensitivity inspection can be conducted. In thisinstance, the chip design information and threshold value setting areacan be superposed on each other when displayed. This makes it easy toconfirm or correct the threshold value setting area or otherwise adjustthe sensitivity.

The invention may be embodied in other specific forms without departingfrom the spirit of essential feature thereof. The present embodiment istherefore to be considered in all respects as illustrative and notrestrictive, the scope of the invention being indicated by the appendedclaims rather than by the foregoing description, and all changes whichcome within the meaning and range of equivalency of the claims aretherefore intended to be embraced therein.

1. An apparatus for inspecting pattern defects, the apparatuscomprising: an image acquisition unit which acquires an image of aspecimen; a defect candidate extraction unit configured to perform adefect candidate extraction process by comparing a detected image signalwith a reference image signal; and a defect detection unit configured toperform a defect detection process and a defect classification processbased on a partial image containing a defect candidate that is extractedby said defect candidate extraction unit, wherein said image acquisitionunit and said defect candidate extraction unit work asynchronously witheach other, and said defect detection unit includes plural defectdetectors, each of the plural defect detectors performs the defectdetection process and the defect classification process in parallelbased on partial images which are different with each other.
 2. Anapparatus according to claim 1, wherein said plural defect detectorsdetect defects from differing pairs of images from each other.
 3. Anapparatus according to claim 1, wherein said plural defect detectorsdetect defects from differing pairs of specimens from each other.
 4. Anapparatus for inspecting defects, comprising: an image acquisition unitwhich acquires an optical image of a specimen with an image sensor andoutput an image signal; a defect candidate extraction unit whichprocesses the image signal output from the image sensor to extractdefect candidates from the image signal; a defect detection unit whichdetects defects from the defect candidates extracted by said defectcandidate extraction unit; and a display unit which displays informationabout the defects detected by said defect detection unit, wherein saidimage acquisition unit and said defect detection unit workasynchronously with each other, and said defect detection unit includesplural defect detectors operating concurrently, performing the defectdetection process and a defect classification process based on partialimages which are different with each other.
 5. An apparatus according toclaim 4, wherein said defect detection unit further classifies saiddetected defects into plural defect classes.
 6. An apparatus accordingto claim 4, wherein said image acquisition unit including a light sourcewhich emits a light, an illumination optical part which illuminate thespecimen with the light emitted from the light source and a lightcollecting part which collects light from the specimen illuminated bythe illumination optical part.
 7. An apparatus according to claim 4,wherein said image sensor of said image acquisition unit is a TDI imagesensor.
 8. An apparatus according to claim 4, wherein said plural defectdetectors detect defects from differing pairs of images from each other.9. An apparatus according to claim 4, wherein said plural defectdetectors detect defects from differing pairs of specimens from eachother.
 10. A method of inspecting defects, comprising: acquiring animage of a specimen with an image sensor and outputting an image signal;processing the image signal output from the image sensor and extractingdefect candidates from the image signal; detecting defects from theextracted defect candidates; and displaying information about thedetected defects, wherein the acquiring the image and the detectingdefects are performed asynchronously with each other, and in thedetecting defects, plural defect detectors are used, and each of theplural defect detectors performs a defect detection process and a defectclassification process in parallel based on partial images which aredifferent with each other.
 11. A method according to claim 10, whereinthe detecting defects, further including classifying said detecteddefects into plural defect classes.
 12. A method according to claim 10,wherein the acquiring the image including, emitting a light from a lightsource, illuminating the specimen with the light and collecting lightfrom the specimen illuminated by the light emitted from the lightsource.
 13. A method according to claim 10, wherein said image sensor isa TDI image sensor.
 14. A method according to claim 10, wherein saidplural defect detectors detect defects from differing pairs of imagesfrom each other.
 15. A method according to claim 10, wherein said pluraldefect detectors detect defects from differing pairs of specimens fromeach other.
 16. An apparatus for inspecting defects, comprising: animage acquisition unit which acquires with an image sensor an image of aspecimen illuminated with light and outputs an image signal; an imageprocessor unit which processes the image signal output from the imageacquisition unit; and a display unit which displays informationprocessed by the image processor unit, wherein said image acquisitionunit and said image processor unit work asynchronously with each other,and said image processor unit includes plural defect detectors, each ofthe plural defect detectors performs a defect detection process and adefect classification process in parallel based on partial images whichare different with each other.
 17. An apparatus according to claim 16,wherein said image processor unit including a defect candidateextraction part which processes the image signal output from the imageacquisition unit to extract defect candidates and a defect detectionpart which detects defects from the defect candidates extracted by saiddefect candidate extraction part.
 18. An apparatus according to claim17, wherein said defect detection part further classifies said detecteddefects into plural defect classes.
 19. An apparatus according to claim16, wherein said image acquisition unit including a light source whichemits a light, an illumination optical part which illuminate thespecimen with the light emitted from the light source and a lightcollecting part which collects light from the specimen illuminated bythe illumination optical part.
 20. An apparatus according to claim 16,wherein said image sensor of said image acquisition unit is a TIDI imagesensor.
 21. An apparatus according to claim 16, wherein said pluraldefect detectors detect defects from differing pairs of images from eachother.
 22. An apparatus according to claim 16, wherein said pluraldefect detectors detect defects from differing pairs of specimens fromeach other.
 23. A method for inspecting defects, comprising: acquiringan image of a specimen with an image sensor and outputting an imagesignal; processing the output image signal to detect defects; anddisplaying information relating to the detected defects on a displayscreen, wherein the acquiring the image and the processing the outputimage signal are preformed asynchronously with each other, and theprocessing the output image signal uses plural defect detectors, each ofthe plural defect detectors performs a defect detection process and adefect classification process in parallel based on partial images whichare different with each other.
 24. A method according to claim 23,wherein the processing includes a defect candidate extractionsub-operation for extracting defect candidates from the image signalacquired by the acquiring, and a defect detection sub-operation fordetecting defects from the defect candidates extracted by said defectcandidate extraction sub-operation.
 25. A method according to claim 24,wherein in the defect detection, sub-operation, further including asub-operation of classifying said detected defects into plural defectclasses.
 26. A method according to claim 23, wherein in the acquiring,the image includes sub-operations of emitting a light, illuminating thespecimen with the emitted light and collecting light from the specimenilluminated by the emitted light.
 27. A method according to claim 23,wherein in the acquiring the image, said image is acquired with a TDIimage sensor.
 28. An apparatus according to claim 23, wherein saidplural defect detectors detect defects from differing pairs of imagesfrom each other.
 29. An apparatus according to claim 23, wherein saidplural defect detectors detect defects from differing pairs of specimensfrom each other.